Measurements of the quantitative lateral analytical resolution at sputtered gold-layers with the FEG-EPMA JEOL JXA-8530F

Publisher： IOP Publishing

E-ISSN： 1757-899X|109|1|4-15

ISSN： 1757-899X

Source： IOP Conference Series: Materials Science and Engineering, Vol.109, Iss.1, 2016-02, pp. : 4-15

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