The Research of Diamond Coatings Morphology Evolution under the Action of Reactive Ion Etching in Perpendicular Direction

Publisher： Trans Tech Publications

E-ISSN： 1662-9795|2016|712|87-92

ISSN： 1013-9826

Source： Key Engineering Materials, Vol.2016, Iss.712, 2016-10, pp. : 87-92

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