Nanoscale Layer Transfer by Hydrogen Ion-Cut Processing: A Brief Review Through Recent U.S. Patents
Publisher: Bentham Science Publishers
E-ISSN: 2212-4020|11|1|42-49
ISSN: 1872-2105
Source: Recent Patents on Nanotechnology, Vol.11, Iss.1, 2017-02, pp. : 42-49
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Abstract