POROUS SILICON MULTILAYERS: SYNTHESIS AND APPLICATIONS

POROUS SILICON MULTILAYERS: SYNTHESIS AND APPLICATIONS

Library of Congress Cataloging-in-Publication Data

CONTENTS

PREFACE

Chapter 1: POROUS SILICON

ABSTRACT

INTRODUCTION

1. HOW WE MAKE POROUS SILICON?

2. PROPERTIES OF POROUS SILICON

3. APPLICATIONS OF POROUS SILICON

SUMMARY

REFERENCES

Chapter 2: THEORY OF PERIODIC DIELECTRIC MULTILAYER STRUCTURES

ABSTRACT

1. PERIODIC DIELECTRIC MULTILAYERS

2. DISTRIBUTED BRAGG REFLECTORS

3. PLANAR MICROCAVITIES

SUMMARY

REFERENCES

Chapter 3: FABRICATION OF POROUS SILICON LAYERS AND CHARACTERIZATION TECHNIQUES

ABSTRACT

1. FABRICATION OF POROUS SILICON LAYERS

2. CHARACTERIZATION TECHNIQUES

SUMMARY

REFERENCES

Chapter 4: ELLIPSOMETRIC STUDY OF POROUS SILICON LAYERS

ABSTRACT

1. PRESENTATION OF THE ELABORATED POROUS SILICON LAYERS

2. ELLIPSOMETRIC INVESTIGATION OF POROUS SILICON LAYERS

3. CALIBRATION OF THE ELECTROCHEMICAL ETCHING PARAMETERS

4. REFRACTIVE INDEX

SUMMARY

REFERENCES

Chapter 5: DESIGN OF POROUS SILICON DISTRIBUTED BRAGG REFLECTORS AND PLANAR MICROCAVITIES AND POTENTIAL APPLICATION AND NOT THEORY OF PERIODIC DIELECTRIC MULTILAYER STRUCTURES

ABSTRACT

1. DESIGN OF THE DISTRIBUTED BRAGG REFLECTORS AND THE PLANAR MICROCAVITIES

2. APPLICATION

SUMMARY

REFERENCES

APPENDIX A

APPENDIX B

INDEX