Development and characterisation of a new line width reference material

Author： Dai Gaoliang   Zhu Fan   Heidelmann Markus   Fritz Georg   Bayer Thomas   Kalt Samuel   Fluegge Jens  

Publisher： IOP Publishing

E-ISSN： 1361-6501|26|11|115006-115016

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.26, Iss.11, 2015-11, pp. : 115006-115016

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