Feature-Scale Simulations of Particulate Slurry Flows in Chemical Mechanical Polishing by Smoothed Particle Hydrodynamics

Publisher： Cambridge University Press

E-ISSN： 1991-7120|16|5|1389-1418

ISSN： 1815-2406

Source： Communications in Computational Physics, Vol.16, Iss.5, 2014-11, pp. : 1389-1418

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