Micro-System Displacement and Profile Measurement By an Integrated Photon Tunneling and Confocal Microscope

Publisher: Cambridge University Press

E-ISSN: 1811-8216|18|4|173-183

ISSN: 1727-7191

Source: Journal of Mechanics, Vol.18, Iss.4, 2002-12, pp. : 173-183

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Abstract