Atomic Layer Deposition (ALD): Fundamentals, Characteristics and Industrial Applications
( Chemical Engineering Methods and Technology )
Publication series ：Chemical Engineering Methods and Technology
Author： Jeannie Valdez
Publisher： Nova Science Publishers, Inc.
Publication year： 2015
E-ISBN: 9781634839204
P-ISBN(Hardback): 9781634838696
Subject： L No classification
Keyword： Chemical Engineering
Language： ENG
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Atomic Layer Deposition (ALD): Fundamentals, Characteristics and Industrial Applications