The role of Ar flow rates on synthesis of nanostructured zirconium nitride layer growth using plasma enhanced hot filament nitriding (PEHFN) technique

Author： Ikhlaq Uzma   Hirose Akira   Ahmad Riaz   Ikhlaq Amir   Saleem Sehrish   Sammynaiken Ramaswami   Zhang Chunzi   Malley Jason  

Publisher： Edp Sciences

E-ISSN： 1286-0050|69|1|10801-10801

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.69, Iss.1, 2015-01, pp. : 10801-10801

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