Design and fabrication of a MEMS high-efficiency NIR-scanning grating based on tilted (1 1 1) silicon wafer

E-ISSN： 1286-0050|72|1|10702-10702

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.72, Iss.1, 2015-09, pp. : 10702-10702

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