Charge storage characteristics of atomic layer deposited ZrO₂/Al₂O₃ multilayered films

Author： Tang Zhenjie Li Rong Zhu Xinhua Liu Zhiguo

E-ISSN： 1286-0050|60|3|30301-30301

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.60, Iss.3, 2012-12, pp. : 30301-30301

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