Surface and electrical properties of plasma processed RF sputtered GaN thin films

Author： Shanmugan Subramani Mutharasu Devarajan Lee Zhi Yin

E-ISSN： 1286-0050|68|3|30303-30303

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.68, Iss.3, 2014-12, pp. : 30303-30303

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