Investigation on optical and physico-chemical properties of LPCVD SiO_xN_y thin films

Author： Kaghouche Bessem Mansour Farida Molliet Christine Rousset Bernard Temple-Boyer Pierre

E-ISSN： 1286-0050|66|2|20301-20301

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.66, Iss.2, 2014-06, pp. : 20301-20301

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