Recent progress in direct patterning technologies based on nano-imprint lithography

Author: Byeon K.-J.   Lee H.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|59|1|10001-10001

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.59, Iss.1, 2012-08, pp. : 10001-10001

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Abstract