GaAs micromachining in the 1 H2SO4:1 H2O2:8 H2O system. From anisotropy to simulation

Author： Tellier C. R.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|53|2|20301-20301

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.53, Iss.2, 2011-01, pp. : 20301-20301

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