Global scattering functions: a tool for grazing incidence small angle X-ray scattering (GISAXS) data analysis of low correlated lateral structures

Author: Lenz S.   Bonini M.   Nett S. K.   Lechmann M. C.   Emmerling S. G.J.   Kappes R. S.   Memesa M.   Timmann A.   Roth S. V.   Gutmann J. S.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|51|1|10601-10601

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.51, Iss.1, 2010-06, pp. : 10601-10601

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Abstract