Combined D-optimal design and generalized regression neural network for modeling of plasma etching rate

Author： You Hailong Chen Yong Liu Peng Jia Xinzhang

E-ISSN： 2107-6847|5|1|105-105

ISSN： 2107-6839

Source： International Journal of Metrology and Quality Engineering, Vol.5, Iss.1, 2014-09, pp. : 105-105

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