Modelling of Precursor Flow and Deposition in Atomic Layer Deposition Reactor

Publisher: Edp Sciences

E-ISSN: 1764-7177|05|C5|C5-245-C5-252

ISSN: 1155-4339

Source: Le Journal de Physique IV, Vol.05, Iss.C5, 1995-06, pp. : C5-245-C5-252

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