Kinetics of LPCVD of gallium nitride and oxynitride films based on pyrolysis of a gallium chloride complex with ammonia GaCl3NH3

Publisher： Edp Sciences

E-ISSN： 1764-7177|11|PR3|Pr3-141-Pr3-148

ISSN： 1155-4339

Source： Le Journal de Physique IV, Vol.11, Iss.PR3, 2001-08, pp. : Pr3-141-Pr3-148

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