Computer investigations of the influences of magnets for magnetron-sputtering

Publisher： Edp Sciences

E-ISSN： 1764-7177|03|C7|C7-1211-C7-1216

ISSN： 1155-4339

Source： Le Journal de Physique IV, Vol.03, Iss.C7, 1993-11, pp. : C7-1211-C7-1216

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Optical properties of Ag island films prepared by radio-frequency magnetron-sputtering using attenuated total reflection method

By Wakamatsu T.   Kato K.   Kaneko F.  

Journal of Modern Optics, Vol. 43, Iss. 11, 1996-11 ,pp. : 2217-2224

Taylor & Francis Ltd

Access to resources Recommend Favorite

Influences of deposition parameters on microstructure and dielectric properties of BST thin film deposited by R.F. magnetron sputtering

By  

Journal of Physics: Conference Series , Vol. 152, Iss. 1, 2009-03 ,pp. : 197-200

IOP Publishing

Access to resources Recommend Favorite

Pt-Co MAGNETS PRODUCED BY DC TRIODE SPUTTERING

By  

Le Journal de Physique Colloques, Vol. 46, Iss. C6, 1985-09 ,pp. : C6-291-C6-294

Edp Sciences

Access to resources Recommend Favorite

High-pressure magnetron sputtering: Gas-phase processes

By Znamenskii A.   Marchenko V.  

Technical Physics, Vol. 43, Iss. 7, 1998-07 ,pp. : 766-773

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Formation of GaAs nanowhisker arrays by magnetron sputtering deposition

By Soshnikov I.   Cirlin G.   Dubrovski V.   Veretekha A.   Gladyshev A.   Ustinov V.  

Physics of the Solid State, Vol. 48, Iss. 4, 2006-04 ,pp. : 786-791

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite