Room and low temperature electrical measurements for the interface characterization of titanium disilicides on silicon from multilayer titanium/silicon structures

Publisher： Edp Sciences

E-ISSN： 1764-7177|04|C6|C6-93-C6-98

ISSN： 1155-4339

Source： Le Journal de Physique IV, Vol.04, Iss.C6, 1994-06, pp. : C6-93-C6-98

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