Oxygen Effect on the Stability of PECVD Boron-Carbon Films

Publisher: Edp Sciences

E-ISSN: 1764-7177|05|C5|C5-921-C5-926

ISSN: 1155-4339

Source: Le Journal de Physique IV, Vol.05, Iss.C5, 1995-06, pp. : C5-921-C5-926

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next