Deposition of Ta2O5 and (TiO2)-(Ta2O5) films from Ta(OEt)4(DMAE) and Ti(OEt)2(DMAE)2, by IMOCVD

Publisher： Edp Sciences

E-ISSN： 1764-7177|09|PR8|Pr8-569-Pr8-573

ISSN： 1155-4339

Source： Le Journal de Physique IV, Vol.09, Iss.PR8, 1999-09, pp. : Pr8-569-Pr8-573

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