Related content

Mechanical properties of diamond like carbon coatings prepared by microwave electron cyclotron resonance plasma chemical vapour deposition process

By  

Journal of Physics: Conference Series , Vol. 114, Iss. 1, 2008-05 ,pp. : 272-279

IOP Publishing

Access to resources Recommend Favorite

Preparation of Bismuth Titanate Films by Electron Cyclotron Resonance Plasma Sputtering-Chemical Vapor Deposition

By  

Le Journal de Physique IV, Vol. 05, Iss. C5, 1995-06 ,pp. : C5-671-C5-677

Edp Sciences

Access to resources Recommend Favorite

Thermal conductivity of aluminium nitride thin films prepared by reactive magnetron sputtering

By Duquenne C   Besland M-P   Tessier P Y   Gautron E   Scudeller Y   Averty D  

Journal of Physics D: Applied Physics, Vol. 45, Iss. 1, 2012-01 ,pp. : 15301-15308

IOP Publishing

Access to resources Recommend Favorite

Carbon nitride films prepared by inductively coupled plasma chemical vapour deposition from a solid carbon source

By  

Le Journal de Physique IV, Vol. 09, Iss. PR8, 1999-09 ,pp. : Pr8-725-Pr8-732

Edp Sciences

Access to resources Recommend Favorite

AlN thin film growth using electron cyclotron resonance reactive sputtering

By  

Journal of Physics: Conference Series , Vol. 557, Iss. 1, 2014-11 ,pp. : 227-231

IOP Publishing

Access to resources Recommend Favorite