Chemical vapor deposition of semi-insulating polycrystalline silicon (SIPOS) : Experience and simulation

Publisher： Edp Sciences

E-ISSN： 1764-7177|09|PR8|Pr8-173-Pr8-180

ISSN： 1155-4339

Source： Le Journal de Physique IV, Vol.09, Iss.PR8, 1999-09, pp. : Pr8-173-Pr8-180

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