Ti-Ni SMA thin film microactuators made on a Si substrate

Publisher： Edp Sciences

E-ISSN： 1764-7177|11|PR8|Pr8-407-Pr8-407

ISSN： 1155-4339

Source： Le Journal de Physique IV, Vol.11, Iss.PR8, 2001-11, pp. : Pr8-407-Pr8-407

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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