MOCVD of aluminium oxide films using aluminium $\beta$-diketonates as precursors

Publisher: Edp Sciences

E-ISSN: 1764-7177|12|4|139-146

ISSN: 1155-4339

Source: Le Journal de Physique IV, Vol.12, Iss.4, 2002-06, pp. : 139-146

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