Silice UVCVD pour transistors MISFET autoalignés sur InP

Publisher: Edp Sciences

E-ISSN: 0035-1687|25|9|935-939

ISSN: 0035-1687

Source: Revue de Physique Appliquée (Paris), Vol.25, Iss.9, 1990-09, pp. : 935-939

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