Etude de la passivation de l'InP-n en plasmas RF et multipolaire d'oxygène

Publisher: Edp Sciences

E-ISSN: 0035-1687|24|3|369-374

ISSN: 0035-1687

Source: Revue de Physique Appliquée (Paris), Vol.24, Iss.3, 1989-03, pp. : 369-374

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