A SPECTROSCOPIC STUDY OF THE DC GAS MAGNETRON DISCHARGE

E-ISSN： 0449-1947|40|C7|C7-61-C7-62

ISSN： 0449-1947

Source： Le Journal de Physique Colloques, Vol.40, Iss.C7, 1979-07, pp. : C7-61-C7-62

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Plasma parameters in a planar dc magnetron sputtering discharge of argon and krypton

Journal of Physics: Conference Series , Vol. 100, Iss. 6, 2008-03 ,pp. : 80-83

IOP Publishing

Access to resources Recommend Favorite

Current-pressure characteristics of dc magnetron discharge for high-rate sputtering

Journal of Physics: Conference Series , Vol. 653, Iss. 1, 2015-11 ,pp. : 877-882

IOP Publishing

Access to resources Recommend Favorite

Simulation of a DC Discharge in a Transverse Supersonic Gas Flow

By Dvinin S. A. Ershov A. P. Timofeev I. B. Chernikov V. A. Shibkov V. M.

High Temperature, Vol. 42, Iss. 2, 2004-03 ,pp. : 171-182

Springer Publishing Company

Access to resources Recommend Favorite

Study of N2/He DC glow discharge

Journal of Physics: Conference Series , Vol. 591, Iss. 1, 2015-03 ,pp. : 490-493

IOP Publishing

Access to resources Recommend Favorite

Study of the sheath potential structure using emissive probe in a dc magnetron plasma

Journal of Physics: Conference Series , Vol. 208, Iss. 1, 2010-02 ,pp. : 995-998

IOP Publishing

Access to resources Recommend Favorite