OBSERVATIONS OF HARMONICS OF THE DISCHARGE CURRENT IN ELECTRODELESS R.F. DISCHARGES IN GAS MIXTURES

Publisher: Edp Sciences

E-ISSN: 0449-1947|40|C7|C7-167-C7-168

ISSN: 0449-1947

Source: Le Journal de Physique Colloques, Vol.40, Iss.C7, 1979-07, pp. : C7-167-C7-168

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