DOPING OF (CH)x FILMS WITH METAL PENTA- AND HEXAFLUORIDES

Publisher: Edp Sciences

E-ISSN: 0449-1947|44|C3|C3-179-C3-182

ISSN: 0449-1947

Source: Le Journal de Physique Colloques, Vol.44, Iss.C3, 1983-06, pp. : C3-179-C3-182

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