STRUCTURE OF THE SILICIDE/Si, SiO2/Si INTERFACE ANALYSED USING HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY

Publisher： Edp Sciences

E-ISSN： 0449-1947|51|C1|C1-729-C1-736

ISSN： 0449-1947

Source： Le Journal de Physique Colloques, Vol.51, Iss.C1, 1990-01, pp. : C1-729-C1-736

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