MICROSTRUCTURE OF Si3N4 FILMS DEPOSITED ON VARIOUS SUBSTRATES BY CVD

Publisher： Edp Sciences

E-ISSN： 0449-1947|47|C1|C1-303-C1-308

ISSN： 0449-1947

Source： Le Journal de Physique Colloques, Vol.47, Iss.C1, 1986-02, pp. : C1-303-C1-308

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

XPS study of CVD silicon thin films deposited on various substrates from SiH4 gaseous precursor

By  

Le Journal de Physique IV, Vol. 09, Iss. PR8, 1999-09 ,pp. : Pr8-1139-Pr8-1145

Edp Sciences

Access to resources Recommend Favorite

Nanostructures based in boro nitride thin films deposited by PLD onto Si/Si3N4/DLC substrate

By  

Journal of Physics: Conference Series , Vol. 167, Iss. 1, 2009-05 ,pp. : 15-19

IOP Publishing

Access to resources Recommend Favorite

Defect studies of Mg films deposited on various substrates

By  

Journal of Physics: Conference Series , Vol. 674, Iss. 1, 2016-01 ,pp. : 170-175

IOP Publishing

Access to resources Recommend Favorite

THE INTERFACIAL MICROSTRUCTURE OF SiC-WHISKER REINFORCED Si3N4

By  

Le Journal de Physique Colloques, Vol. 51, Iss. C1, 1990-01 ,pp. : C1-1043-C1-1048

Edp Sciences

Access to resources Recommend Favorite

Structural and Piezoelectric Properties of DC-Sputtered AlN Films Deposited on Different Si-Based Substrates

By Ingrosso I.   Tasco V.   Altamura D.   De Vittorio M.   Passaseo A.  

Ferroelectrics, Vol. 389, Iss. 1, 2009-01 ,pp. : 41-48

Taylor & Francis Ltd

Access to resources Recommend Favorite