MICROSTRUCTURE OF Si3N4 FILMS DEPOSITED ON VARIOUS SUBSTRATES BY CVD

Publisher: Edp Sciences

E-ISSN: 0449-1947|47|C1|C1-303-C1-308

ISSN: 0449-1947

Source: Le Journal de Physique Colloques, Vol.47, Iss.C1, 1986-02, pp. : C1-303-C1-308

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