THE SPUTTERING OF NON-METALS UNDER SLOW MULTIPLY CHARGED IONS

Publisher: Edp Sciences

E-ISSN: 0449-1947|50|C2|C2-227-C2-230

ISSN: 0449-1947

Source: Le Journal de Physique Colloques, Vol.50, Iss.C2, 1989-02, pp. : C2-227-C2-230

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