LINE DOSE DEPENDENCE OF SILICON AND GALLIUM ARSENIDE REMOVAL BY A FOCUSED GALLIUM ION BEAM

E-ISSN： 0449-1947|48|C6|C6-165-C6-170

ISSN： 0449-1947

Source： Le Journal de Physique Colloques, Vol.48, Iss.C6, 1987-11, pp. : C6-165-C6-170

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