FAST PLASMA DEPOSITION OF CARBON AND SILICON LAYERS

Publisher： Edp Sciences

E-ISSN： 0449-1947|51|C5|C5-361-C5-367

ISSN： 0449-1947

Source： Le Journal de Physique Colloques, Vol.51, Iss.C5, 1990-09, pp. : C5-361-C5-367

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