Design Optimization and Fabrication of High-Sensitivity SOI Pressure Sensors with High Signal-to-Noise Ratios Based on Silicon Nanowire Piezoresistors

Author： Zhang Jiahong   Zhao Yang   Ge Yixian   Li Min   Yang Lijuan   Mao Xiaoli  

Publisher： MDPI

E-ISSN： 2072-666x|7|10|187-187

ISSN： 2072-666x

Source： Micromachines, Vol.7, Iss.10, 2016-10, pp. : 187-187

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