Deposition of Cu/a‐C:H Nanocomposite Films

Publisher: John Wiley & Sons Inc

E-ISSN: 1612-8869|13|9|879-887

ISSN: 1612-8850

Source: PLASMA PROCESSES AND POLYMERS (ELECTRONIC), Vol.13, Iss.9, 2016-09, pp. : 879-887

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Abstract