A Piezo-Driven Compliant Nanopositioning Stage with Large Stroke for Micro/Nano Manipulation

Publisher: Edp Sciences

E-ISSN: 2261-236x|77|issue|01040-01040

ISSN: 2261-236x

Source: MATEC Web of conference, Vol.77, Iss.issue, 2016-10, pp. : 01040-01040

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Abstract