New DRIE-Patterned Electrets for Vibration Energy Harvesting

Author: Boisseau S.  

Publisher: Edp Sciences

E-ISSN: 2100-014x|33|issue|02010-02010

ISSN: 2100-014x

Source: EPJ Web of Conference, Vol.33, Iss.issue, 2012-10, pp. : 02010-02010

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Abstract