Development of microforming process combined with selective chemical vapor deposition

Publisher: Edp Sciences

E-ISSN: 2261-236x|21|issue|09011-09011

ISSN: 2261-236x

Source: MATEC Web of conference, Vol.21, Iss.issue, 2015-08, pp. : 09011-09011

Access to resources Favorite

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract