Modeling and non-linear responses of MEMS capacitive accelerometer

Author: Sri Harsha C.  

Publisher: Edp Sciences

E-ISSN: 2261-236x|16|issue|04003-04003

ISSN: 2261-236x

Source: MATEC Web of conference, Vol.16, Iss.issue, 2014-09, pp. : 04003-04003

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Abstract