Research on the Shape Precison of the Micro-groove in the Silicon under Diamond Fly-cutting

Publisher： Edp Sciences

E-ISSN： 2261-236x|67|issue|03023-03023

ISSN： 2261-236x

Source： MATEC Web of conference, Vol.67, Iss.issue, 2016-07, pp. : 03023-03023

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