Dynamics of a Micro Electrical Mechanical System Subject to Thermoelastic and Squeeze-Film Damping

Publisher： Edp Sciences

E-ISSN： 2261-236x|1|issue|04004-04004

ISSN： 2261-236x

Source： MATEC Web of conference, Vol.1, Iss.issue, 2012-07, pp. : 04004-04004

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