Effect of Nitrogen Flow Rate on Structure and Adhesion Strength of Magnetron Sputtered Ti-Si-N Nanocomposite Films

Publisher： Edp Sciences

E-ISSN： 2261-236x|67|issue|04015-04015

ISSN： 2261-236x

Source： MATEC Web of conference, Vol.67, Iss.issue, 2016-07, pp. : 04015-04015

Access to resources Favorite

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Correlations of plasma parameters and properties of magnetron sputtered TiN films

By Kumari N.   Das P.S.   Joshi N.K.   Barhai P.K.  

EPJ Applied Physics (The), Vol. 59, Iss. 2, 2012-09 ,pp. : 20302-20302

Edp Sciences

Access to resources Recommend Favorite

Influence of the deposition conditions on the optoelectronic properties of R.F. magnetron sputtered a-Si:H films*

By Daouahi M.   Zellama K.   Elkaïm P.   Dixmier J.   Bouchriha H.  

EPJ Applied Physics (The), Vol. 1, Iss. 3, 2010-03 ,pp. : 301-304

Edp Sciences

Access to resources Recommend Favorite

Effect of the hydrogen dilution on the short-range and intermediate-range-order in radiofrequency magnetron sputtered hydrogenated amorphous silicon films

By Ben Othman A.   Daouahi M.   Henocque J.   Zellama K.   Bouchriha H.  

EPJ Applied Physics (The), Vol. 28, Iss. 1, 2004-06 ,pp. : 19-26

Edp Sciences

Access to resources Recommend Favorite

Effect of thermal annealing on structural, optical and electrical properties of RF reactive magnetron sputtered CdO thin films

By Kumar Gadipelly Anil   Ramana Reddy Musugu   Narasimha Reddy Katta  

EPJ Applied Physics (The), Vol. 68, Iss. 1, 2014-10 ,pp. : 10302-10302

Edp Sciences

Access to resources Recommend Favorite

Coating of Ti-6Al-4V alloy substrates with TiN/Ti multi-layered films by magnetron sputtering*

By Sonoda T.   Kotake S.   Katou K.   Asahina T.  

EPJ Applied Physics (The), Vol. 38, Iss. 1, 2007-03 ,pp. : 69-72

Edp Sciences

Access to resources Recommend Favorite