Study on a New Method for Improving Resolution of Grating Interferometer Displacement Measuring System

Publisher: Edp Sciences

E-ISSN: 2261-236x|42|issue|02001-02001

ISSN: 2261-236x

Source: MATEC Web of conference, Vol.42, Iss.issue, 2016-02, pp. : 02001-02001

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Abstract