Fabrication of a capacitive relative humidity sensor using aluminum thin films deposited on etched printed circuit board

Publisher： Edp Sciences

E-ISSN： 2261-236x|59|issue|01011-01011

ISSN： 2261-236x

Source： MATEC Web of conference, Vol.59, Iss.issue, 2016-05, pp. : 01011-01011

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