

Publisher: Edp Sciences
E-ISSN: 2261-236x|8|issue|04011-04011
ISSN: 2261-236x
Source: MATEC Web of conference, Vol.8, Iss.issue, 2013-11, pp. : 04011-04011
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Abstract
We report measurement of the ablation depth and self-reflectivity from thin silicon films illuminated by a single tightly focused femtosecond laser pulse. We show the dependence of ablation depth on incident laser pulse fluence can be modeled with a transfer-matrix method, taking into account transient reflectivity and light propagation in a stratified medium. We find optical interference effects in laser ablation of thin films are of crucial importance. Furthermore, We present the evidence of self-scattering effects due to the buildup of a three dimensional submicron sized plasma in the focal region.
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