A (Bio-)Chemical Field-Effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer

Author： Schöning Michael J. Simonis Anette Ruge Christian Ecken Holger Müller-Veggian Mattea Lüth Hans

Publisher： MDPI

E-ISSN： 1424-8220|2|1|11-22

ISSN： 1424-8220

Source： Sensors, Vol.2, Iss.1, 2002-01, pp. : 11-22

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